Wafers with super-thick, thermal oxidized films developed by the unique technologies of KST World are now an indispensable material for optical devices underpinning optical communication. Our products and technologies are chosen by leading manufacturers of communication devices and optical parts around the world.

Undercladding wafer for AWG

With respect to optical waveguides (AWG), the so-called undercladding layer, which is the lowermost SiO2 film, has a critical effect on the process yield.
The thick, thermal oxidized films of KST World have the leading share of the global market thanks to their excellent surface cleanliness and stable film quality.

Guaranteed specifications

Item	Specifications
Film thickness	20 µm ± 5% (Maximum film thickness)
In-plane uniformity	± 0.5%
Surface uniformity	± 0.5%
Refractive index (@ 1550 nm)	1.4458 ± 0.0001

Standard product line

Size	Wafer thickness	Thermal oxidized film thickness
4 inches	525um, 1mm	15 µm, 20 µm
6 inches	625um, 675um, 1mm	15 µm, 20 µm
8 inches	725um	15 µm, 20 µm
12 inches	775um	15 µm

Refractive index in-plane distribution data

Surface roughness data